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The μROBOTEX platform

The μROBOTEX platform is a facility dedicated to charaterization and micro-assembly of micro/nanosystems whose dimensions are below 10µm.

 

Located at ENSMM in Besançon (France), µROBOTEX is operational since 2014 and managed by the AS2M department of the FEMTO-ST Institute.  µROBOTEX hosts various tools for handling and characterization of micro/nano-samples such optical and electron microscopes, 6 DoF microrobots, laser interferometers and micro/nano-forces sensors for biomedical application.  In particular, µROBOTEX is equipped of a SEM (Scanning Electron Microscope) with a wide chamber, that includes a FIB (Focusing Ion Beam), a GIS (Gas Injection System) and 14 DoF manipulation micro/nano-stages.

 

The aim of µROBOTEX is to provide researchers in micro/nanotechnologies with competitive instruments at the international level.  Combining knowledge on microsystems, physical and chemical phenomena at nanoscale and control theory, this facility represents a unique environment for automated micro/nano-assembly and position/force feedback manipulation and characterization of samples.  Access to the facility is open to academic and industrial partners for their research and/or development projects.

 

µROBOTEX was funded by the EQUIPEX ROBOTEX (ANR-10-EQPX-44-01) of the PIA (Programme d’Investissements d’Avenir) and Région Franche-Comté.