FEMTO-ST Institute (Besançon) is one of the biggest and most competitive French laboratories in engineering
sciences. Technological platform MIMENTO of FEMTO-ST, dedicated to micro-fabrication of acoustic and optic
components with long-years expertise on LN manufacturing including thin film growth, is one of the biggest
clean rooms in France (network RTB). FEMTO-ST will be in charge of chemical engineering and synthesis LN
films by DLI-CVD, characterization of structural and physical properties (electrical and acoustical) of thin films,
and microfabrication and characterization of acoustic devices. Contributing researchers: A. Bartasyte (expertise
in PIMOCVD, LiNbO3 thin films synthesis & characterization), S. Margueron (spectrocopic and optical
characterization), W. Daniau (acoustic simulations and characterization).
C2PM (Villeurbanne) (http://www.c2p2-cpe.com/index.php): The major focus of the research at the C2P2 is on
the use of fundamental chemistry, catalysis, and chemical engineering to enhance the ability to produce
inorganic and composite materials, and to propose the processes used for this purpose. The field of research of
Pr. S. Daniele concerns the design of inorganic molecular precursor and their transformation in (hybrid) nanoobjects
by liquid and gas-phase soft chemical routes (sol-gel, MOCVD, ALD, CBVD). C2PM will be in charge of
molecular engineering and mechanistic study of innovative metalorganic precursors of Li, Nb, Ta for DLI-CVD.
Annealsys (Montpellier) Since its founding in 2004, Annealsys is a worldwide specialist in the design and
manufacturing of Rapid Thermal Processing (RTP) and Chemical Vapor Deposition (CVD) equipment for
Research and Development, Quality Control and ‘niche market’ applications. Their RTA/RTP systems cover a
wide range of applications and Annealsys already showed the advantage of Direct Liquid Injection CVD
techniques for the synthesis of hetero-metallic oxide materials. DLI allows a high level of vapour flow control
for transition metals, alkaline and alkaline-earth element precursors even for those which have low vapour
pressure properties. J.M. Decams (DLI-CVD process design and control). Annealsys will be in charge of
development of DLI-CVD systems, support in development of thin film growth process and its control).