The MOEMS group gave an Invited talk at 19th Chemnitzer Seminar (ENAS/Fraunhofer Institute, Chemnitz, Germany) on “System integration technologies”, “A platform for vertical multi-wafer integration of micromachined microscopes”, by S. Bargiel.
The MOEMS group gave an Invited talk at 19th Chemnitzer Seminar (ENAS/Fraunhofer Institute, Chemnitz, Germany) on “System integration technologies”, “A platform for vertical multi-wafer integration of micromachined microscopes”, by S. Bargiel.